Bob,
    yes I think it does: its response time is 3-5 ms; its chip measures 1.5 x
1.5 x 0.5 mm and its velocity measurement range is typically 1 to 1000 cm/s.
Its commercial package includes an electronic circuit on a 25 x 25 mm alumina
substrate. Cost: 40-80$ depending on quantity. Model No.: AWM4000, designed
for the user to provide his own flow channel. I assume it is larger than 25
mm diameter?
Ulrich
_______________________________________________________________________________
From: Horning Bob on Mon, Jul 1, 1996 9:24 AM
Subject: FW: MEMS flow sensors
To: Bonne Ulrich

Ulrich

Does our MAF sensor fit this description?

Bob
_______________________________________________________________________________
From: mems@ISI.EDU on Fri, Jun 28, 1996 8:18 PM
Subject: MEMS flow sensors
To: MEMS@ISI.EDU

Hi,


  I am looking for a directional flow sensor which has a response time on the

order of milliseconds and comes in a small package (< 2 mm).  It has to work
in
a high flow ambient, say 4 liters/sec, but does not have to quantitatively
measure the flow, just sense directional changes.  Does anyone know of any
existing products.  Thanks for your time.


Sincerely,


John Buan

John S. Buan
Minnesota Innovative
     Technologies and Instruments Corp.
603 Washington Ave. SE  #503
Mpls., MN 55414-2950
buan0001@gold.tc.umn.edu
phone: (612) 626-1541
fax:   (612) 625-0558



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From: "John S. Buan" 
Subject: MEMS flow sensors
Date: Thu, 27 Jun 96 11:21:31 -0500
To: MEMS@ISI.EDU
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