Dear Jennifer, Way back,HMDS was widely used as a 10-20% solution in EGMEA wich was the positive resist solvent. The fumes of both together was reported to cause some health problems and was not reccomended for pregnant women. I tend to think that when the industry moved to PGMEA 'safe solvent' the problem went away. Shay Jennifer Scalf wrote: > I've heard from many people that HMDS is very, very bad for you. > However, the few MSDSs that I have read do no indicate that it is > anything other than a strong irritant and highly flammable. Why do > people seem to think it is a teratogen, mutagen, carcinogen, etc? Do > some MSDS's have more information than others? If so, can someone point > me toward one that explains hazards other than irritation and > flammability. > > Jennifer > _______________________________________________ > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.mems-exchange.org/