durusmail: mems-talk: Conformability of SiO2 and Si deposition
Conformability of SiO2 and Si deposition
1996-07-11
Conformability of SiO2 and Si deposition
Xuecheng Jin
1996-07-11
Dear MEMS experts,
        May I know which gives better conformability in deposition, SiO2 or Si?
I am using it as a sacrificial layer between gold and nitride. Is there
any better choice to give best the conformability? Thanks a lot.

Best Regards.                                            Sincerely Yours,
                                                         XueCheng JIN
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                                XueCheng JIN
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Phone:   (415) 497-0724 (home)                   Address: 8G Barnes
Web:     http://www-leland.stanford.edu/~xcjin            Escondido Village
Email:   xcjin@leland.stanford.edu                        Stanford, CA 94305
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