Dear MEMS experts, May I know which gives better conformability in deposition, SiO2 or Si? I am using it as a sacrificial layer between gold and nitride. Is there any better choice to give best the conformability? Thanks a lot. Best Regards. Sincerely Yours, XueCheng JIN ============================================================================ XueCheng JIN -------------- Phone: (415) 497-0724 (home) Address: 8G Barnes Web: http://www-leland.stanford.edu/~xcjin Escondido Village Email: xcjin@leland.stanford.edu Stanford, CA 94305 ============================================================================