Hi Li,
Test for leak are:
fine leaks MIL STD 883 METHOD 1014
gross leaks MIL STD 883 METHOD 1014
Bye

li gang a icrit :

> Dear all,
>
> Could you please give me some advice or information about
> leak test for vacuum package? As far as I know, there are
> some standard for leak test including fine and gross test.
> However, it is reported that the method is not very appropriate
> for small cavity.
>
> Any advice, information or reference are greatly appriciated.
>
> Thanks in advance,
>
> Li Gang
>
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Dr. Paolo Bondavalli
R&D Engineer
LABCOM - Laboratoire Interconnexions Optiques et MEMS
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Disclaimer: Opinions expressed herein are my own and may
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