Laser based measurement system should do it.

--- Burkhard Volland 
wrote:
> Hi Bahram,
>
> you go to : http://ojps.aip.org/ , then klick on
> "Search SPIN", or go
> directly to
>
>
http://ojps.aip.org/vsearch/servlet/VerityServlet?KEY=ALL
>
> Degen's displacement measurement setup was not of
> microscopic scale, but the
> measured displacement was microscopic. What is your
> application?
>
> Regards, Burkhard
>
> -----Urspr|ngliche Nachricht-----
> Von: Bahram Ghodsian
> 
> An: Burkhard Volland 
> Datum: Dienstag, 5. Februar 2002 21:30
> Betreff: Re: [mems-talk] Contact less displacement
> sensor
>
>
> >Hi Burkhard,
> >
> >Could you please provide information about the
> address to SPIN web? It is
> >much appreciated.
> >
> >Thanks,
> >--
> >Bahram
> >
> >On Tue, 5 Feb 2002, Burkhard Volland wrote:
> >
> >> Have a look at
> >> Artur Degen, "Investigation of Stress in Silicon
> Membranes",
> Dissertation,
> >> Univ. of Kassel, 2001. The stress was calculated
> from membrane
> defelctions.
> >> Or, search for "Degen" as author in SPIN Web.
> >>
> >> Regards,
> >> Burkhard
> >> -----Urspr|ngliche Nachricht-----
> >> Von: Mandar Deshpande 
> >> An: mems-talk@memsnet.org 
> >> Datum: Montag, 4. Februar 2002 18:28
> >> Betreff: [mems-talk] Contact less displacement
> sensor
> >>
> >>
> >> >Hi,
> >> >I am looking for  a supplier who can provide a
> contact less micro
> >> >displacement sensor for measuring membrane
> deflection.
> >> >I would appreciate if anyone can give me a
> contact or suggest any other
> way
> >> >to do the measurement.
> >> >
> >> >Thanks
> >> >
> >> >-Mandar Deshpande
> >> >Graduate Student
> >> >Mechanical Engineering
> >> >UIC- Chicago
> >> >_______________________________________________
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