Dear MEMS colleagues, Can someone tell me how I can have to etch the quartz disk that is 1 mm thick. I tried with HF solution and Cr mask, but etching rate is slow. Thanks a lot Best regards, Luciano ---------------------------------------------------------------------------- ------------ Ing. Luciano Scaltrito Dipartimento di Fisica Politecnico di Torino C.so Duca degli Abruzzi, 24 10129 Torino, Italy tel +39 011 564.7305/564.4160 fax +39 011 564.7399 E-mail : scaltrito@polito.it http://www.polito.it/centri/laborato/limadel/film/index.html ---------------------------------------------------------------------------- ------------