Common test specifications (leak and gross test) for hermetic
packages are given in MIL-STD-883E, Method 1014.9 (SEAL). You can
download the whole test specifications from the net (I don't remember
the link). I doubt the suitability of at least the He-test for
volumes much smaller than 1 mm^3. Check out

Rao R. Tummala: "microelectronics Packaging Handbook: Semiconductor
packaging (Part II)", Kluwer, 1997, 2nd ed, pp. II-887.

Jourdain et al, "investigation of the hermeticity of BCB-sealed
cavities for housing (RF-)MEMS devices", Proc. MEMS2002, pp. 677-680.

>
>Date: Thu, 07 Feb 2002 01:34:47 +0800
>Subject: [mems-talk] Leak test for vacuum package.
>Reply-To: mems-talk@memsnet.org
>
>Dear all,
>
>Could you please give me some advice or information about
>leak test for vacuum package? As far as I know, there are
>some standard for leak test including fine and gross test.
>However, it is reported that the method is not very appropriate
>for small cavity.
>
>Any advice, information or reference are greatly appriciated.
>
>Thanks in advance,
>
>Li Gang
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