It's actually low. 0.0035 micron/min at 85C Best Regards, Rafiqul Islam EV Group Inc.- Technology- Tel: (602) 437 9492 x 118, (602)2842134 (cell),Fax: (602) 437 9435, e-mail: R.Islam@EVGroup.com web: www.EVGroup.com -----Original Message----- From: Brian Semak [mailto:bse@hymite.com] Sent: Friday, February 08, 2002 6:13 AM To: mems-talk@memsnet.org Subject: [mems-talk] Si (111) etch rates I would like to know if anyone has done or know of some results of the etch rate of 111 planes in silicon, in KOH. The values I've found in the litterature seems to low. Med venlig hilsen/Kind regards Brian S. Semak, M.Sc. (Phys.) R&D Hermetic Packaging Hymite Aps DTU, Bygn. 325, 1st floor 2800 Lyngby Telephone(Direct): + 45 4525 9147 Fax: + 45 4525 9156 E-mail: BSE@hymite.com www.hymite.com _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/