Hi,

I am Sathya, a graduate student at Texas A&M University. I need some kind of a
sensor that can detect the deflection of a micro cantilever ( L - 10mm, B -
500um, t - 100 um). What I am doing is, I elecroplate the silicon fabricated
micro cantilever with permalloy, this cantilver is connected to another
cantilever ( L - 10mm, B - 500um, t - 100um), which acts as a spring. Now I
need to measure the deflection at the point where the 2 cantilevers are
attached to eachother (The end points of the cantilevers are joint together) .
What I thought was that I could use a piezoelectric thin film for the spring,
so that it can give the deflection directly. I want to know if a thin
piezofilm can be used for sensing static deflections in the range 2-5 microns.
Please tell me some suppliers that supply such thin piezofilms. Thanks.

Regards,
Sathya
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                     " The truth is out there "

 Sathyanarayanan Mani    aka  Sathya
 Graduate Research Assistant
 MEMS/Nano Technology Lab
 Department of Aerospace Engineering
 Texas A&M University
        Office: 602A H.R. Bright Building
 Phone (O) : (979) 845-2468
       (H) : (979) 260-4909
 Email : satyam@tamu.edu
 Web   : http://www.sathyam.homepage.com

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