We use Cr as an adhesion layer, as stated before. When we etched in KOH afterwards we found a lot of bubbles in the metal layer. This improved a lot after after "sintering" at 300 deg C for a couple of minutes under Nitrogen. We believe the Cr-layer "eats up" some of the oxide. Maybe it also works with Titanium. Alexander Hoelke Graduate Student Electrical Engeneering University of Cincinnati MEMS Group e-mail aholke@uceng.uc.edu