durusmail: mems-talk: Chromium-Silicon Adhesion
Chromium-Silicon Adhesion
Chromium-Silicon Adhesion
bharat@seas.ucla.edu
1996-07-15
Dear MEMS community:

Can someone suggest references for the tensile and shear adhesion
strengths of evaporated chromium on silicon and SiO2 ?

Interface adhesion strengths of other adhesion promoters like Ti on
silicon/oxide would also be useful.

Thanks in advance.
--
Bharat Shivkumar
Micro-Manufacturing Laboratory
Mechanical and Aerospace Engg Dept.
UCLA  CA 90095
(O) (310) 825-3977     (H) (310) 824-5402


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