Yes there are at least 2 commercial mask aligners that will align both sides
of the wafer O.A.I. and Quintel.  Microchem is the company with the
photoactive compound NANO MX 6C there was a question about yesterday, phone
number 617 965 5511 a good contact is Mark Shaw ext. 308.  The same company
may have the answer for thick Polymide.  The thickest I have worked with is 80
microns of Polymide but I have worked with 400 micron thick SU8 a negative
acting chemically amplified resist produced by Microchem.  Plasma experiments
on bridge structures can be done using my companies horizontal/vertical
plasma, it is designed to sweep under bridges, if I am contacted.  Bill
Moffat

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