TO:  mems@isi.edu
FROM:  102575.1273@compuserve.com
DATE:  960722
SUBJECT:  micromachined cryocoolers

For several years, Sunpower, Inc. and Ohio University have been designing and
developing microrefrigerators to be located inside microelectronics packages
along with the cryoelectronic devices and circuits that they serve.  These
micromachines are designed to provide watts (not microwatts or milliwatts) of
cooling power.  Public domain type information about this program is now
available on the web at http://ohiou.edu/ictto/mcab

We are seeking additional collaborators and sponsors for expanding this program
to complete component and process development, and to demonstrate prototype
microrefrigerators and cryoelectronic systems.  Technical capability
requirements include bulk etching of quartz and both (100) and (110) silicon,
high pressure oxidation, wafer bonding, and cryoelectronic packaging.

Prospective technical collaborators may contact Lyn Bowman, Microrefrigerator
Program Manager, Sunpower, Inc.