>I'd like to get some 3", N(100), resistivity>5 Ohm-cm, 200um thick wafers.
>Does anybody know where I can get them?  Besides, I want to etch polyimide
>film the wafer, does anybody know the etchant for the polyimde wet etching?
>Any reply will be appreciated. Thanks in advance,
>Best regards,
>
>Lin
>
>**************************************************
>Lin Wang,  Graduate Student
>Department of Electrical and Computer Engineering
>Beckman Institute, Rm B428C
>University of Illinois at Urbana-Champaign
>405 North Mathews Avenue
>Urbana, IL 61801
>
>e-mail: lwang@uibrl.brl.uiuc.edu, linwang1@uiuc.edu
>Tel. (217)-333-1088(O), (217)-351-8976(R)
>**************************************************
>
>
>

Virginia Semiconductor (703-373-2900) is a good source for custom wafers.
Transese (508-948-2501) makes a Kapton  etchant