Heidelberg instruments makes direct write systems. See www.himt.de

-Mike

>>> TJ.Davis@csiro.au 03/26/02 07:22PM >>>
Hi memsnet

I am looking for information about UV laser scanning systems for
writing
patterns onto photoresist directly from digital artwork. Such a system
would
consist of a UV laser, a modulator to control the UV dose and a
scanning
head. A search of the web locates many references to systems like this
but
there do not seem to be any suppliers mentioned.

I would be grateful for any information about what is around and who
can
supply it.

Regards

Tim Davis
CSIRO
Australia.
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