durusmail: mems-talk: Re: reducing selectivity of KOH
Re: reducing selectivity of KOH
1996-08-20
1996-08-22
Re: reducing selectivity of KOH
Alexander Holke
1996-08-22
>
>
> Howdy,
>
> Does anyone know how to REDUCE the selectivity of the 100:111 planes for
> KOH etches of silicon.  I do wish to stay with the KOH chemistry.
>
> thanks
>
> ALEXANDER BARR
> xander@utpapa.ph.utexas.edu
>
>
>


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