durusmail: mems-talk: Re: Plasma Etching
Re: Plasma Etching
1996-08-22
Re: Plasma Etching
Alexander Holke
1996-08-22
>
> Hi,
>
>         Does anyone know if it is possible to produce results of similar
> quality to that of RIE in a conventional plasma etcher?
>
>         Thanks,
>
>                 Mike.
>
>
>
>


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