Hello, I'm looking for suppliers of SOI and epi wafers that produce wafers for MEMS applications. What I'm looking for is: 20 um of silicon on top of an etch stop (1 um oxide for SOI wafers and 1 um boron doped layer for the epi). Any suggestions would be appreciated. Thanks Ken Westra Staff Scientist Alberta Microelectronic Centre westra@amc.ab.ca