Dear all,

I have a question on capacitive accelerometer measurement.
When I measure the capacitive accelerometer which is fabricated
by DRIE, the output voltage always drift even without acceleration
applied on it.
I use both PCB circuits based on ADI's scheme and ASIC from
microsensors. Both have this question. I suspect that it's due to
the effect of parasitic capacitance. However, I found same question
even I shield the device and circuit in the metal box.
Do you have any experimence and explaination to this problem?
Any information will be greatly appericiated.

Thanks in advance,

Regards,

Li Gang