Hello, I am conducting some experiments in Vapor Phase etching using anhydrous HF/Methanol mixtures.My sacrificial layer is Silicon dioxide (LPCVD deposited at 420C, 2um thick) and my structural layer is Silicon Nitride (low stress 0.5um thick). The nitride comes under heavy attack during the sacrificial layer release with vapor phase etching (anhydrous HF/Methanol mixtures). I am looking for ways to protect the nitride layer in this HF/methanol environment. It would be nice if someone could give me some direction on how to proceed with this issue. Sincerely Anupama Anupama V. Govindarajan Graduate Student The Pennsylvania State University Department Of Electrical Engineering 201 EE East #13 University Park, PA 16802 Phone 814-863-3211 email: anupamag@psu.edu