Our group at the Hughes Aircraft Technology Center performed some
collaboratory work with UC Davis back in the early 90's. Here are a couple
of references.

R. W. Bower, M. S. Ismail and B. E. Roberds, 'Low Temperature Si3N4 Direct
Bonding'. Published in Appl. Phys. Lett., 28 June 1993 pp. 2485-3487.

R. W. Bower, M. S. Ismail, B. E. Roberds and S. N. Farrens, 'One-Step Direct
Bonding Process of Low Temperature Si3N4 and TiN Technology'. Conference on
Solid-State Sensors and Actuators (Transducers 93), Yokohama, Japan. June
(1993). Published in the Journal of Transducers 93 June (1993).

Regards,

Mike Barger
Klesis Corporation
+1 215 527 0313

-----Original Message-----
From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On
Behalf Of Mingiu Lee
Sent: Saturday, May 11, 2002 11:03 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Silicon Nitride Bonding


Dear Colleagues,

Can anyone let us know how we can do nitride-nitride
bonding?

Thanks in advance.

Derrick Chou
Microlics
LAUNCH - Your Yahoo! Music Experience
http://launch.yahoo.com
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