Hi Dlee,
What kind of method you used to etch glass? Just curious.

Peng

----- Original Message -----
From: "Dlee Li" 
To: 
Sent: Thursday, May 23, 2002 5:03 PM
Subject: [mems-talk] Metal mask for HF


> Hi, folks
> I want to etch 80um width 40um depth channel on Pyrex 7740 glass wafer.We
> succeed using 20nm Cr+ 200nm Au metal mask to get this channel. I read some
> post, it seems just 1000A Cr should be enough to get such kind dimension
> channel on the glass. Anyone has the similar experiences? please comfirm
> this for me.
>
> Thanks at advance.
> Dlee
>
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