Hi, I have heard of them, they have an inductively Coupled system called the 'Tornado' - thats about all i know. is it performing ok with respect to Linewidth and wafer uniformity during etching of oxide (or nitride)? Phil -----Original Message----- From: Mr. Malek [mailto:smalek2000@yahoo.com] Sent: 28 May 2002 19:41 To: mems-talk@memsnet.org Subject: [mems-talk] SAMCO Etching Systems? Has anyone ever heard of SAMCO? They are Japanese company with an office in Sunnyvale, CA. We are currenlty evaluating their systems. I was wondering if there is anyone who has heard of this company before or has any of their systems. Their Web site URL is http://www.samcointl.com. Any information is appreciated. Thank you. Yahoo! - Official partner of 2002 FIFA World Cup http://fifaworldcup.yahoo.com _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/ *************************************************************************** This email and any attachments are confidential to the intended recipient and may also be privileged. If you are not the intended recipient please delete it from your system and notify the sender. You should not copy it or use it for any purpose nor disclose or distribute its contents to any other person. ***************************************************************************