Roger, Here is a website for a product called Wafermount. It is similar to Crystalbond in that it is temporary and can be removed with a solvent, however it is in a sheet form. I don't know how it would hold up in BOE. www.proscitech.com/notes/i509.htm -Tanya Snyder From: "Roger Shile"To: Subject: [mems-talk] backside protection Reply-To: mems-talk@memsnet.org I am looking for a tape to put on the backside of 100 mm Si wafers to preserve the oxide on the back, while etching the front in buffered oxide etch. I have seen this done using dicing tape. A coworker told me about something called "Yellow Tape" that came in circular pieces the same size as the wafer, apparently made for this purpose. After use, the Yellow Tape was removed with acetone, which would be an advantage over peeling dicing tape from delicate substrates. Could someone refer me to a source for this Yellow Tape or suggest an alternative? Roger Shile Yahoo! - Official partner of 2002 FIFA World Cup http://fifaworldcup.yahoo.com