Hello!

  We are trying to find SOI wafer with thick SiO2 layer about 6um thickness.

Or If you know some group or person who deposite SiO2 film more than 6 um.
Please,

Let me know the contact point.

  We are looking for sacrificial layer for poly-silicon actuator structure.


Have a nice day for everybody.



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Soon Cheol Kweon

Members of Technical Staff.
MEMS Lab.

SAMSUNG
Advanced Institute of Technology

P.O.Box 111, Suwon
440-600, KOREA

TEL:82-31-280-9448
Fax:82-31-280-9473
E-mail:sckweon@samsung.co.kr
        infiniti@samsung.com
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