Hi, I have had radiation damage to CMOS circuits after mems processing. The radiation damage is primarily caused by RIE, RF Sputtering or Ion Beam etching. There is a Company that sells wafers called CHARM wafers that are used to find out which equipment causes the damage. What happens is the electron density of the plasma gets into the gate oxide and can rupture the oxide or cause a mirror charge which shifts threshold voltages. If you contact me I can try to dig out the contact information and we can discuss this in more detail. Rick Rick Morrison Sr. Semiconductor Engineer Radant Mems Inc. 255 Hudson Road Stow Ma, 01775 Tel- 978-562-3866 Cell 508-801-4796 AMS Phone: 508-770-3521 EMAIL rmorrison@radanttechnologies.com