Try the article:
Topographical micropatterning of PDMS using laminar flows of liquids in
capillaries
Adv. Mater. 2001, 13, No. 8, April 18, p 570

Glen

At 12:01 PM 7/10/2002, you wrote:
>From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]
>On Behalf Of Keyur Shah
>Sent: Wednesday, July 10, 2002 7:20 AM
>To: mems-talk@memsnet.org
>Subject: [mems-talk] PDMS etching
>
>
>Hello everybody,
>
>I want to etch PDMS for my research work. Can anybody
>suggest me the ways to etch it? Is it possible to etch
>PDMS by using oxygen plasma? if yes, what is the etch
>rate?
>
>Thanking you all in anticipation,
>
>Keyur Shah
>
>=====
>Keyur Shah
>M.S(Chemical Engineering), Louisiana Tech University
>Research Assistant, Louisiana Tech University
>Apt#12, 106, South Homer Street,
>Ruston, Louisiana-71270,USA.
>phone no:318-513-9240