durusmail: mems-talk: Re: 2 responses
Re: 2 responses
Re: 2 responses
Ash Parameswaran
1996-02-13
Thanks,
I checked the chemical hand-book and yes ascorbic acid is Vitamin-C

We also tried tinkering around with Vitamin-C in EDP. It basically reduces the
pH so the attack rate of aluminum reduces, but it also reduces the silicon etch
rate in EDP. We do not have any quantitative numbers, but our feeling is if we
need to etch certain depth in silicon then the amount of aluminum eaten away
might be the same with and without this new additive.

Ash
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From: reid_zeigler@Merck.Com (Reid Zeigler)
Subject: Re: 2 responses
To: Ash Parameswaran
MIME-version: 1.0
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Status: R


>Incidentally, isn't ascorbic acid Vitamin "A"?

>Sincerely

>Ash


ascorbic acid is vitamin C

Reid
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