Would someone be so kind as to give me a good reference(s) for the "wagon-wheel" or "star-shaped" pattern that is sometimes used for determining anisotropic etch rates in silicon? A reference for alternate test structures would also be appreciated. Thanks, Kevin Walsh -- Dr. Kevin M. Walsh Electrical Engineering Department, Speed Scientific School University of Louisville, Louisville, KY 40292 (502) 852-0826 Internet address: kmwals01@starbase.spd.louisville.edu