durusmail: mems-talk: Photoresist as a release layer
Photoresist as a release layer
1996-12-05
Photoresist as a release layer
Michael Little
1996-12-05
I'm trying ot develop a device that will include metal cantilevers and
would like to use photoresist as a release layer.  I can't find any
references to any experience in this. Does anybody have any advice (don't
try this, it's easy, ...)or pointers to references?

Thanks,
         Mike



                 Mike


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