durusmail: mems-talk: Al2O3 etch rate
Al2O3 etch rate
2002-08-27
2002-08-28
Al2O3 etch rate
Chadwick Canedy
2002-08-27
Does anybody know where I can find information regarding the etch rate of
alumina in Buffered Oxide Etch (10:1)?  thanks

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