Dear Kumar, You may try a much shorter and much hotter alloying process before annealing. Good luck, Oray Orkun Cellek o.o.cellek@ieee.org Middle East Technical University EE Dept. 06531 Ankara Turkey Tel : +90 312 210 4579 Fax : +90 312 210 1261 ----- Original Message ----- From: "Parshant Kumar"To: Sent: Thursday, September 05, 2002 8:29 PM Subject: [mems-talk] delamination of Au/Ni/Ge/Au layers in Citric acid solution etch > Hi All, > > I am working with the wet etch of GaAs in citric > acid:Hydrogen peroxide::5:1. I am facing the problem that > Electrode deposited as Au/Ni/Ge/Au layers start delaminated > after 55-60 mintues of etching. However if we anneal the > sample for 30 mintues at the 150 degree calcious, the > effect is less. > > Any comment will be appericiated > > Thx > > Kumar > Maryland MEMS Lab > University of Maryland > College Park-MD 20742 > Tel 301-405-0364 > > > __________________________________________________ > Do You Yahoo!? > Yahoo! Finance - Get real-time stock quotes > http://finance.yahoo.com > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/ >