For vacuum evaporation, how do you clean your wafers? What I did was several baths of organic solvents (Acetone, MeOH, EtOH) and water followed by UV-Ozone, and finally "Piranha" bath cleaning. Finally I rinse wafers in DI water and blow dry w/ N2 gas. But after metal deposition I can still see some particular impurities apparently imbedded underneath. What should I do? Thank you for any suggestions and advices. -Soojin UNC-CH __________________________________________________ Do you Yahoo!? Yahoo! News - Today's headlines http://news.yahoo.com