Dear Ton van Helvoort: Thank you for the information. Wenlin jin "Antonius Helvoort"@memsnet.org on 09/21/2002 05:17:00 AM Please respond to mems-talk@memsnet.org Sent by: mems-talk-admin@memsnet.org To: mems-talk@memsnet.org cc: Subject: Re: [mems-talk] anodic wafer bonding Dear Wenlin Jin, Hope these references, discussing damage due to E-field will be of used to you (and others): SchjØlberg-Henriksen K., Plaza J.A., Rafí J.M., Esteve J., Campabadal F., Santander J., Jensen G.U. and Hanneborg A., "Protection of MOS capacitors during anodic bonding", Journal of Micromechanics and Microengineering, 12, 361-367, 2002 SchjØlberg-Henriksen K., Hanneborg A.B., Jensen G.U., Lapadatu A.C. and Jakobsen H., "Electrical effects of anodic bonding on silicon dioxide situated in Pyrex cavities", Journal of the Electrochemical Society, 149, G497-G503, 2002. Li Z., Hao Y., Zhang D., Li T. and Wu G., " An SOI-MEMS technology using substrate layer and bonded glass as wafer-level package", Sensors and Actuators, 96, 34-42, 2002. Cozma, A., Jakobsen, H. and Puers, R.,"Electrical characterization of anodically bonded wafers", Journal of Micromechanics and Microengineering, 8, p 69-73, 1998. Cambridge, UK >From: Wenlin.Jin@jdsu.com >Reply-To: mems-talk@memsnet.org >To: mems-talk@memsnet.org >Subject: [mems-talk] anodic wafer bonding >Date: Wed, 11 Sep 2002 08:45:15 -0400 > >Hello: > >In anodic bonded chips, there exist electric charges in the bonding area. >If the chip is an electro-static device, will these charges interact with >electrical voltage applied? > >Your help is highly appreciated. > >Wenlin Jin > > > > >_______________________________________________ >MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list >options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk >Hosted by the MEMS Exchange, providers of MEMS processing services. >Visit us at http://www.memsnet.org/ _________________________________________________________________ Send and receive Hotmail on your mobile device: http://mobile.msn.com _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/