durusmail: mems-talk: SnO2 Etchant
SnO2 Etchant
2002-10-03
SnO2 Etchant
Rudolf Lessmann
2002-10-03
You can use HI (acid) or FCl with zinc powder (use the zinc powder over the Sno2
as a catalisator).

rudolf

ps: if you wish I can search the articles who describe this procedure.

*********** REPLY SEPARATOR  ***********

On 03.10.02 at 21:31 Mr. Rahul Mishra wrote:

>Hi
>Can anybody tell me the etchant for Sno2, deposited using DC Magnetron
>Sputtering on Si substrate with Gold Electrodes ?
>
>
>
>
>
>Rahul Mishra
>Research Student (M.Sc.(Engg))
>Department of Instrumentation
>IISc, Bangalore-560012
>Ph. : 394 2349
>==============================
>Students' Hostel, E-67
>Ph. : 394 2622
>
>rahulmishra79@rediffmail.com
>rahulmischra@hotmail.com
>
>
>_______________________________________________
>MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
>options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>Hosted by the MEMS Exchange, providers of MEMS processing services.
>Visit us at http://www.memsnet.org/





reply