durusmail: mems-talk: Polymer as mechanical structure.
Polymer as mechanical structure.
2002-10-06
Polymer as mechanical structure.
li gang
2002-10-06
Dear all,

Could you recommend some polymer with good mechanical charateristics?
How to form them, by spining, PVD or CVD?
Besides, could you tell me what's the key parameters used to evaluate
mechanical charateristics? What's the main defects of the polymer as
mechanical structure?

Thanks in advance,

Regards,
Li Gang



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