durusmail: mems-talk: Nafion actuator microfabrication
Nafion actuator microfabrication
2002-10-07
Nafion actuator microfabrication
ZHOU WEN LI
2002-10-07
Dear all,

I'm doing work on the microfabrication of Nafion actuator on Si. Is there
anyone who has the experience to prepare multi-layers on nonplanar surface
by spin-on with Nafion solution?Thanks!


Jennifer



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