Hi, I am trying to find some information about UV-ozone clean in the area of semiconductor fabrication. Specifically, I am interested in the comparision between UV-ozone clean and O2 plasma clean. Is there any advantage of ozone? I really couldn't find any useful information on the web. Could anyone provide anything that I can start with? Thanks much. Yuan __________________________________________________ Do you Yahoo!? Faith Hill - Exclusive Performances, Videos & More http://faith.yahoo.com