Dear Wenlin, mainly the stiction comes from dry process. water capillary force may draw beam towards substrate and other forces like van der waals or surface tension developed. the solutions might be heat up when you dry it, or use solution such as IPA to lower the surface tension, XeF2 or CO2 for supercritical sublimation, or simply modify your layout structures for anti stiction. good luck. Inst. of MEMS, NTHU Message: 8 To: mems-talk@memsnet.org From: Wenlin.Jin@jdsu.com Date: Thu, 10 Oct 2002 09:58:02 -0400 Subject: [mems-talk] stiction of contacting surfaces Reply-To: mems-talk@memsnet.org Hello: I'm working on electrostatic curved beams. It has been observed that after certain cycles of operation, stiction of the beam to substrate occurs. I'm wondering if there are researches done on the mechanism of the stiction and how it can be avoided. Any information will be appreciated. Best regard Wenlin Jin