> ...Can anyone tell me how to manufacture cantilever > beam using Focused Ion Beam... Ravi, there are several ways you could use a FIB to make cantilevers. And there must be references in the literature of people making MEMS structures with FIBs, though I don't have any at my fingertips. Regardless of which method you pursue, I think you'll have to use a sacrificial material for a temporary support. You'll have to get rid of this sacrificial material later, probably after FIBing. Method 1: Etch/Pattern only * obtain substrate with sacrificial material and structural material already deposited * etch/pattern away unwanted structural material * remove sacrificial material method 2 and 3 are useful if you have deposition capability Method 2: Deposit structural material * obtain substrate with sacrificial material * (optional) pattern "anchor" in sacrificial material * deposit structural material in desired pattern (will be a negative image of Method 1) * remove sacrificial material Method 3: Deposit sacrificial and structural materials * obtain substrate * deposit sacrificial material in desired pattern * deposit structural material in desired pattern * remove sacrificial material Bill Eaton, Ph.D. Materials & Analysis Manager NP Photonics 5706 Corsa Avenue, Suite 100 Westlake Village, CA 91362 Voice: (818) 991-7044 x211 eFax: (503) 214-5559 mailto://bill@npphotonics.com www.parvenutech.com