durusmail: mems-talk: Thick PECVD SiN vendor
Thick PECVD SiN vendor
2002-10-24
2002-10-25
Thick PECVD SiN vendor
Inna
2002-10-25
Hello Tom,

You can try a few companies, which work with silicon (and other) coatings:

1. Thin Film Concepts
914-592-4700
www.thinfilmconcepts.com

2. Thin Film Devices
714-630-7127
Unfortunately, I don't remember their www, but I'm sure you'll be able to
find it after a brief web search.

3. Thin-Film Research, Inc.
978-692-953
www.thinfilmresearch.com


Good luck,


Inna Mushkatinskaya

Sr. Process Specialist
Anvik Corporation
6 Skyline Drive
Hawthorne NY 10532

Tel: 914-345-2442, etx.18
Fax: 914-345-2452

Web: www.anvik.com
E-mail: innam@anvik.com



on 10/24/02 11:01 AM, Tom Wester at tom_wester@ieee.org wrote:

> Hi,
> Does anyone know of a vendor who can deposit a 10 micron poly silicon
> layer? Keeping the stress down is important.
>
> Regards,
> Tom Wester
>
> ProcessTek
> PO Box 315
> Lynnfield, MA 01940
> office 781-595-1355, fax 781-595-9582
> tom_wester@ieee.org



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