durusmail: mems-talk: Bonding Si to Si
Bonding Si to Si
2002-10-31
2002-11-01
2002-11-01
2002-11-01
2002-11-04
Bonding material impervious to KOH bath
2002-11-04
Bonding Si to Si
Josef Kouba
2002-10-31
Hi all MEMS talk members,

can anybody give me some advise how to bond two silicon wafers together?
Do I need some special wafers for it or can I use common wafers? I would
also appreciate any reliable and good information source about this
problem.

Thanks for your help

Best Regards

Josef Kouba
Louisiana State University
Center foot Advanced Microstructures & Devices
6980 Jefferson Hwy.
Baton Rouge, LA 70806, USA
(225) 578-9371 - Tel.
(225) 578-6954 - Fax.



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