Hi everyone,

Does anyone have any information about the effect of concentration
and temperature of TMAH to its selectivity (Si/SiO2) ?

Although, there are a lot of papers on improving the surface quality,
undercutting etc. I have not been able to get any papers on
TMAh selectivities (Si/Sio2).

Any pointers will be greatly appreciated...

Thanks in advance...

Manish Mehta
email: mehta@cs.sfu.ca