Dear MEMS group, Can any one please tell me how to find out the time for diffusing 10um N-type spin-on-liquid dopant on P-type Si substrate.Do we need to use any software to run. or its just the substitution of formulas. I have one more question how can we know the background concentration of a wafer. because i got 4inch p-type (100) wafers of resistivity 1-40 ohms/cm. I have no idea of finding the background concentration (Nd) with the data supplied. Thanking you, Regards, Amith K Arigapudi.