durusmail: mems-talk: Si3N4 to glass
Si3N4 to glass
2002-12-08
2002-12-09
Si3N4 to glass
Imran Ghauri
2002-12-09
Use silicon fusion bonding technique.
Imran
--- Enzhu Liang  wrote:
> Hi there,
>
> I have one more question: How to bond silicon
> nitride ( a silicon wafer with silicon nitride layer
> on top) to a glass wafer? Thanks.
>
> Best regards,
>
>        Enzhu Liang
> ¡¡¡¡¡¡¡¡¡¡¡¡¡¡
>
>
>
>
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