Dear MEMS-talk members,


I have a question about adhesion of liquid resists to polyimides. In
particular, adhesion of I-line resists made by Shipley and AZ to liquid
polyimides deposited on silicon or glass wafer. Does anybody have any
experience with this?

Thanks in advance,


Inna Mushkatinskaya


Sr. Process Specialist
Anvik Corporation
6 Skyline Drive
Hawthorne NY 10532

Tel: 914-345-2442, etx.18
Fax: 914-345-2452

Web: www.anvik.com
E-mail: innam@anvik.com