Dear guys,

Any body has relative experiences on Poly-PSG deposition?

Film information:
Lower: PECVD PSG --> 950C, annealing
Upper: LPCVD Poly-Si --> 950C, doping ---> 1050C, annealing

Problem list:
(1) We have the peeling problem during the Poly doping or annealing. Does
any body know why this happen?
(2) Is this problem can be prevented by reflow PSG in advance? The reflow
temperature is ?
(3) How about doping and anneal Poly-Si in the same time?

Thank You!!

Yi-Ping Ho