Greetings, Tae-Won,
According to a metal etchants sheet I have:

Mo -> HCl:H2O2 1:1
W  -> HF:HNO3  1:1

should work at room temperature. I don't have etch rates.

If you can find a copy of the CRC Handbook of Etchants for Metals and
Metallic Compounds, It's pretty good.

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Never worry again about the quality of your random numbers!"
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On Thu, 26 Dec 2002, Lee Tae-Won wrote:

> Dear colleagues.
>
> I'm trying to etch sputtered Mo and W after photo-lithography.
>
> Could you please let me know which wet&dry etchants are effective for these
materials.
>
> furthermore  , Adhesion ability with Au(gold) is good in these materials?
>
> Thank you for your help , in advance.
>
>
> PS .  Recommendation  of related references and papers would be appreciated.
>
> E-mail : twlee@aerojet.snu.ac.kr
>
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