Sputtered W and Mo  can meet constant 100~200A film thickness in whole substrate
area ?

i'm worry about bad coverage on substrate due to very thin thickness.

If impossible , how about using electoplating process?

Happy New Year...
TW Lee.

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/ aero MEMS Laboratory ,
/ School of Mechanical & Aerospace Engineering,
/ Seoul National University , KOREA
/
/ C.P : 016 - 459 - 3024
/ Lab : 02 - 880 - 1728