Has anyone experience with making stable PECVD-nitride membranes? Kind regards, Johan. ______________________________________________ ir.ing. Johan E. van der Linden University of Gent (Belgium) Department of Information Technology (INTEC) St-Pietersnieuwstraat 41 B-9000 Gent Tel + 32 9 264 33 16 Fax + 32 9 264 35 93 e-mail: johan.vanderlinden@intec.rug.ac.be ______________________________________________